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Publication
Three-fluid model of the plasma-sheath region for a planar probe immersed in an active oxygen discharge. Validity of the Boltzmann relation
Details
Three-fluid model of the plasma-sheath region for a planar probe immersed in an active oxygen discharge. Validity of the Boltzmann relation
ISSN
09630252
Date Issued
2021
Author(s)
ANTONIO TEJERO DEL CAZ
ANTONIO TEJERO DEL CAZ
ENCARNACION MUÑOZ SERRANO
RUT MORALES CRESPO
DOI
10.1088/1361-6595/abfbe9
Subjects
Condensed Matter Phys...
Condensed Matter Phys...